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9 November 1999 Analysis of a MEMS vibration detector
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Proceedings Volume 3903, Indo-Russian Workshop on Micromechanical Systems; (1999) https://doi.org/10.1117/12.369478
Event: Indo-Russian Workshop on Micromechanical Systems, 1999, New Delhi, India
Abstract
A MEMS vibration detector fabricated at the Solid State PHysics Laboratory, Delhi, has been analyzed for its mechanical response. The sensor consists of a central plate mounted on webs. Change of capacitance between the central plate and the base is used to measure the vibration. This paper describes analysis of the mechanical characteristics of the device.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anuj Gupta, Smriti Mukherjee, Vinoy K. Jain, and Amita Gupta "Analysis of a MEMS vibration detector", Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); https://doi.org/10.1117/12.369478
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