Application of porous silicon in membrane methane sensors

V. I. Beklemyshev; V. Berezine; Victor A. Bykov; L. Kiselev; I. Makhonin; V. Pevgov; V. Pustovoy; A. Semynov; Y. Sencov; I. Shkuropat; A. Shokin

doi:10.1117/12.369449

9 November 1999 Application of porous silicon in membrane methane sensors

V. I. Beklemyshev, V. Berezine, Victor A. Bykov, L. Kiselev, I. Makhonin, V. Pevgov, V. Pustovoy, A. Semynov, Y. Sencov, I. Shkuropat, A. Shokin

Author Affiliations +

Proceedings Volume 3903, Indo-Russian Workshop on Micromechanical Systems; (1999) https://doi.org/10.1117/12.369449
Event: Indo-Russian Workshop on Micromechanical Systems, 1999, New Delhi, India

Abstract

On the base of silicon semiconductor and membrane technology was developed and produced a methane-control sensor, which is notable for small energy consumption and high speed. As a functional element was used a catalytic layer, which is a chemically deposited platinum and/or palladium, on the nanostructural silicon. With on the framework of this project, a mechanism of chemical deposition of platinum and palladium on the porous silicon was investigated. On the base of IR-spectrography results, ASM-microscopy of developed structures and thermodynamical analysis was observed the ultimate role of surface protonation of porous silicon in the process of metal deposition. Testing of developed sensor has shown that functional layer on the base of metalized porous silicon is not inferior according to its catalytic properties of platinum or palladium.

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V. I. Beklemyshev, V. Berezine, Victor A. Bykov, L. Kiselev, I. Makhonin, V. Pevgov, V. Pustovoy, A. Semynov, Y. Sencov, I. Shkuropat, and A. Shokin "Application of porous silicon in membrane methane sensors", Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); https://doi.org/10.1117/12.369449

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