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9 November 1999 Current-controlled curled tip
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Proceedings Volume 3903, Indo-Russian Workshop on Micromechanical Systems; (1999) https://doi.org/10.1117/12.369464
Event: Indo-Russian Workshop on Micromechanical Systems, 1999, New Delhi, India
Abstract
There have been several cantilever-based actuators which provide movement in a direction transverse to the length of the cantilever. Here we describe a novel actuator which gives movement in the same direction as that of the length of the element. This is achieved by a curling up action of a bimetal like 'metal on silicon dioxide' straight element due to large differences in the coefficients of linear expansions and the high temperature which is obtained during the metal deposition.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Prakash R. Apte, S. G. Lokhre, S. C. Purandare, B. Gajanan, and Kumar Virwani "Current-controlled curled tip", Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); https://doi.org/10.1117/12.369464
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