Design of a hybrid silicon fiber optic pressure sensor array for tactile sensing

Arvind D. Shaligram; Prakash R. Apte; Damayanti C. Gharpure; L. Sudha

doi:10.1117/12.369463

9 November 1999 Design of a hybrid silicon fiber optic pressure sensor array for tactile sensing

Arvind D. Shaligram, Prakash R. Apte, Damayanti C. Gharpure, L. Sudha

Proceedings Volume 3903, Indo-Russian Workshop on Micromechanical Systems; (1999) https://doi.org/10.1117/12.369463
Event: Indo-Russian Workshop on Micromechanical Systems, 1999, New Delhi, India

Abstract

This paper presents design of an hybrid micromachined silicon - fiber optic pressure sensor array for tactile sensing applications. Tactile sensing is basically related to identify the surface texture through pressure/strain distribution over a sensor matrix. Silicon micromachining technology has shown the capabilities of producing structures like diaphragms, cantilevers and precise holes. With anisotropic etching and techniques like boron stop these structures can be designed to desired precision. Conventionally, techniques like deposited or doped piezoresistors on the diaphragms or cantilevers are used for pressure/strain sensing. These, however, require support of sophisticated external signal conditioning.

Citation Download Citation

Arvind D. Shaligram, Prakash R. Apte, Damayanti C. Gharpure, and L. Sudha "Design of a hybrid silicon fiber optic pressure sensor array for tactile sensing", Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); https://doi.org/10.1117/12.369463

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available