Silicon sensors and microsystems

N. A. Shelepin

doi:10.1117/12.369454

9 November 1999 Silicon sensors and microsystems

N. A. Shelepin

Proceedings Volume 3903, Indo-Russian Workshop on Micromechanical Systems; (1999) https://doi.org/10.1117/12.369454
Event: Indo-Russian Workshop on Micromechanical Systems, 1999, New Delhi, India

Abstract

Scientific and Manufacturing Complex 'Technological Center' (SMC TC) was founded in the Moscow Institute of Electronic Technology in 1988. In 1989 in 'Technological Centers' a set of technological and analytical equipment for treatment of silicon wafers of 100 mm of diameter and manufacturing of photomask was put into operation. In 1990 the first integrated circuits were made on CMOS technology. Since 1994 the research and works out int he area of microsensors' and microsystems' technologies have been conducted.

Citation Download Citation

N. A. Shelepin "Silicon sensors and microsystems", Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); https://doi.org/10.1117/12.369454

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