18 November 1999 Method of determining small linear displacement
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Proceedings Volume 3904, Fourth International Conference on Correlation Optics; (1999) https://doi.org/10.1117/12.370415
Event: International Conference on Correlation Optics, 1999, Chernivsti, Ukraine
Abstract
A method of small linear displacement determination with subnanometer accuracy, which is based on interaction of the interference field of two laser beams with a 3D holographic diffraction grating fastened on the moveable object, was suggested.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andriy Yurievich Popov, Andriy Yurievich Popov, Vitaly M. Belous, Vitaly M. Belous, Valery P. Churashov, Valery P. Churashov, Lidiya I. Manchenko, Lidiya I. Manchenko, Vladimir E. Mandel, Vladimir E. Mandel, Yuriy B. Shugailo, Yuriy B. Shugailo, Alexander V. Tyurin, Alexander V. Tyurin, } "Method of determining small linear displacement", Proc. SPIE 3904, Fourth International Conference on Correlation Optics, (18 November 1999); doi: 10.1117/12.370415; https://doi.org/10.1117/12.370415
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