Portable interference device for roughness measurement

Oleg V. Angelsky; Ivan A. Buchkovsky; V. S. Lomanets; Peter P. Maksimyak

doi:10.1117/12.370440

18 November 1999 Portable interference device for roughness measurement

Oleg V. Angelsky, Ivan A. Buchkovsky, V. S. Lomanets, Peter P. Maksimyak

Proceedings Volume 3904, Fourth International Conference on Correlation Optics; (1999) https://doi.org/10.1117/12.370440
Event: International Conference on Correlation Optics, 1999, Chernivsti, Ukraine

Abstract

The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is used to develop a method for rough surface diagnostics. The treatment is based on the model of random phase object with inhomogeneity phase dispersion. The proposed diagnostic method is applicable to arbitrarily shaped surfaces. The sensitivity limit of the method in measuring the standard deviation of surface profile from base line is about 0.003 micrometers .

Citation Download Citation

Oleg V. Angelsky, Ivan A. Buchkovsky, V. S. Lomanets, and Peter P. Maksimyak "Portable interference device for roughness measurement", Proc. SPIE 3904, Fourth International Conference on Correlation Optics, (18 November 1999); https://doi.org/10.1117/12.370440

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