15 March 2000 Long-range translation actuator
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Proceedings Volume 3912, Micro- and Nanotechnology for Biomedical and Environmental Applications; (2000) https://doi.org/10.1117/12.379573
Event: BiOS 2000 The International Symposium on Biomedical Optics, 2000, San Jose, CA, United States
Abstract
A long range translation actuator designed for optic and robotic applications is presented. Specifically, the microstage is designed to operate as the moving mirror in a miniature version of a traditional Michelson Fourier transform spectrometer. The translational microstage utilizes an electromagnetic actuation mechanism to realize linear translation of centimeters of precision travel. Motion is constrained in the normal and lateral directions using silicon dovetail microjoints. The electromagnetic actuation is based on macro linear synchronous motor design using a linear array of microcoils. Microcoils are arranged in a 3-phase configuration to enable both velocity and direction control. The electromagnetic force is characterized by finite element computer simulations to develop the input signal for translational travel at constant velocity. Optical position detection was used to measure the translation with time. Operation was demonstrated at various drive frequencies.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrew P. Wallace, Andrew P. Wallace, D. L. Howard, D. L. Howard, J. Marcos Sirota, J. Marcos Sirota, Rosemary L. Smith, Rosemary L. Smith, Scott D. Collins, Scott D. Collins, } "Long-range translation actuator", Proc. SPIE 3912, Micro- and Nanotechnology for Biomedical and Environmental Applications, (15 March 2000); doi: 10.1117/12.379573; https://doi.org/10.1117/12.379573
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