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15 March 2000 Microspectrometer system for the near-infrared wavelength range based on LIGA technology
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Proceedings Volume 3912, Micro- and Nanotechnology for Biomedical and Environmental Applications; (2000)
Event: BiOS 2000 The International Symposium on Biomedical Optics, 2000, San Jose, CA, United States
In recent years, microspectrometer systems fabricated by the LIGA technology for use in the visible wavelength range increasingly made their way to the market. For spectral analysis in the infrared range, a highly transmissive hollow waveguide has now been developed and demonstrated successfully. In combination with linear detector arrays, the hollow waveguide microspectrometer allows to design portable near infrared spectrometer systems. Such a system has now been applied to evaluate the spectrum from 0.9 micrometer to 1.15 micrometer in second order and from 1.15 micrometer to 1.75 micrometer in first order. Due to its outer dimensions of 54 X 36 X 7 mm3 and a low power consumption, it can be integrated in portable spectral analysis systems. It exhibits a high sensitivity (NEP below 11 pW) due to a fiber-optical entrance with a fiber core diameter of 300 micrometer. An indium-gallium-arsenide linear detector array based on a novel setup concept is incorporated in the system. Furthermore, units for preamplification of the signal and 16-bit AD conversion are contained. In the present paper, the setup and fabrication of the whole microspectrometer system, its optical features and the detector-specific solutions are described. The fabrication process which is based on molded polymer parts is presented. Using the experimental results of the electro- optical tests and the polymer spectra measured, the performance of the system will be demonstrated.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Krippner, Thomas Kuehner, Juergen Mohr, and Volker Saile "Microspectrometer system for the near-infrared wavelength range based on LIGA technology", Proc. SPIE 3912, Micro- and Nanotechnology for Biomedical and Environmental Applications, (15 March 2000);


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