Characterization of excimer lasers for use with optical integrators

George N. Lawrence; Ying Lin

doi:10.1117/12.385393

12 May 2000 Characterization of excimer lasers for use with optical integrators

George N. Lawrence, Ying Lin

Proceedings Volume 3930, Laser Resonators III; (2000) https://doi.org/10.1117/12.385393
Event: Symposium on High-Power Lasers and Applications, 2000, San Jose, CA, United States

Abstract

Excimer lasers are the preferred source of illumination for photolithographic systems. Lenslet array optical integrators are very frequently used to achieve good uniformity of illumination at the plane of the mask--the target to be recorded by the photolithographic system. Lenslet arrays break the incident beam up into subapertures and the resulting beams are overlapped at the plane of the target with variable incident angles. The overlapping of the tilted beams segments results in coherent interference effects leading to fine-scale intensity modulation called orange peel. We show that the ideal method of characterization of excimer lasers for this application is the Young's double hole test with hole spacing set to the lenslet element separation. This method to be superior to other common measures of laser quality such as angular divergence and M².

Citation Download Citation

George N. Lawrence and Ying Lin "Characterization of excimer lasers for use with optical integrators", Proc. SPIE 3930, Laser Resonators III, (12 May 2000); https://doi.org/10.1117/12.385393

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