Developments of laser processing technologies in the Japanese MITI project

Takehito Yoshida; Toshio Sato; Yoshiaki Yoshida; Ken-ichi Matsuno

doi:10.1117/12.387551

7 June 2000 Developments of laser processing technologies in the Japanese MITI project

Takehito Yoshida, Toshio Sato, Yoshiaki Yoshida, Ken-ichi Matsuno

Proceedings Volume 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V; (2000) https://doi.org/10.1117/12.387551
Event: Symposium on High-Power Lasers and Applications, 2000, San Jose, CA, United States

Abstract

The 'Advanced Photon Processing and Measurement Technologies' project was started in August 1997 as part of the Industrial Science and Technology Frontier Program of the Agency of Industrial Science and Technology, the Ministry of International Trade and Industry in Japan. Thirteen private companies, one university, and four national research institutes are developing new technologies using high-quality photon beams, in the three technology fields: 'Photon-applied processing technology', 'Photon- applied measurement technology', and 'Photon generation technology'. Recent topics in the 'Photon generation technology' field are 3.3 kW output power form LD-pumped all-solid-state Nd:YAG lasers of both rod-type and slab- type, and 20 W VU output power via CLBO crystals. There are various topics also in the other two technologies. In 'Photon-applied processing technology' field, high speed defects-free welding properties have been confirmed for 10 mm thick stainless steel, by using a 8.5 kW iodine laser and nitrogen assist gas. Furthermore, we have developed integrated process systems of pulsed laser ablation in helium background gas, size classification using a differential mobility analyzer, and deposition onto a substrate, for the purpose of synthesizing for semiconductor and refractory metal nanoparticles size-controlled accurately. Consequently, we have deposited the size- controlled accurately. Consequently, we have deposited the size-controlled nanoparticles onto substrates with sharp size distributions in geometrical standard deviation: 1.2.

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Takehito Yoshida, Toshio Sato, Yoshiaki Yoshida, and Ken-ichi Matsuno "Developments of laser processing technologies in the Japanese MITI project", Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); https://doi.org/10.1117/12.387551

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KEYWORDS

Particles

Silicon

Laser applications

Nanoparticles

Laser development

Fiber lasers

Laser processing

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