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7 June 2000 Excimer laser micromachining for fabrication of diamond diffractive optical elements
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Proceedings Volume 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V; (2000) https://doi.org/10.1117/12.387570
Event: Symposium on High-Power Lasers and Applications, 2000, San Jose, CA, United States
Abstract
Results of the development of multilevel diamond diffractive optical elements for high power CO2 lasers are reported. For this purpose, the technique of selected-area laser ablation was applied to create a given phase microrelief on mechanically polished CVD polycrystalline diamond plates. High precision micromachining of the diamond plates was performed using a KrF excimer-laser-based system. The spherical and cylindrical Fresnel lenses with an aperture up to 6 by 6 mm6 were produced and tested with a cw CO2 laser. The diffraction efficiency of the developed DOE measured in the case of the cylindrical lens was found to be only 1-2 percent lower than the theoretical value. Also a diffractive shaper transforming a Gaussian beam of a CO2 laser into a uniformly filled-in rectangle was designed and fabricated.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vitali I. Konov, V. V. Kononenko, Sergej M. Pimenov, Alexander M. Prokhorov, Vladimir S. Pavelyev, Victor A. Soifer, Peter F. Muys, and E. Vandamme "Excimer laser micromachining for fabrication of diamond diffractive optical elements", Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); https://doi.org/10.1117/12.387570
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