7 June 2000 High-accuracy microdrilling of steel with solid state UV laser at a rate of 10 mm/sec
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Proceedings Volume 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V; (2000) https://doi.org/10.1117/12.387592
Event: Symposium on High-Power Lasers and Applications, 2000, San Jose, CA, United States
Abstract
We investigated wavelength- and intensity-dependence of ablation rate achievable with a diode-pumped Q-switched Nd:YAG laser with frequency doubling and tripling. The laser produced 15 ns-long pulses at a repetition rate of 10 kHz and output power of 28 W in the fundamental beam, and 15 W and 10 W in the second and third harmonics, respectively. We found that in thin stainless and carbon steel foils, fast ablation starts at the laser fluence level of 10 J/cm2. The ablation rate remains close to 1 micrometers per pulse with very little change as the laser fluence increases by more than order of magnitude above this threshold exit of the hole. This attenuation is strongly dependent on the laser wavelength. Particularly, using third harmonic output, we were able to sustain average drilling speed of more than 1 micrometers per pulse in samples up to 1 mm thick. At the same time, removal rate at fundamental wavelength decreased by almost an order of magnitude.
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Sergei V. Govorkov, Evgueni V. Slobodtchikov, Alexander O. Wiessner, Dirk Basting, "High-accuracy microdrilling of steel with solid state UV laser at a rate of 10 mm/sec", Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); doi: 10.1117/12.387592; https://doi.org/10.1117/12.387592
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