Laser micromachining: new developments and applications

Nadeem Hasan Rizvi; David K. Milne; Phil T. Rumsby; Malcolm C. Gower

doi:10.1117/12.387562

7 June 2000 Laser micromachining: new developments and applications

Nadeem Hasan Rizvi, David K. Milne, Phil T. Rumsby, Malcolm C. Gower

Proceedings Volume 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V; (2000) https://doi.org/10.1117/12.387562
Event: Symposium on High-Power Lasers and Applications, 2000, San Jose, CA, United States

Abstract

Excimer laser micromachining has developed into a mature production method and many industrial applications such as the drilling of ink-jet printer nozzles, production environments. The important concepts of excimer laser micromachining systems are described and the novel methods which have been developed in this area are presented. In particular, techniques for the production of complex, multi- level 3D microstructures are described and examples of such features are used to illustrate the relevant applications. Furthermore, some initial micromachining result from a sub- nanosecond, solid-state fiber laser are presented to highlight the rapidly-growing area of laser micro processing using ultra-short pulse lasers.

Citation Download Citation

Nadeem Hasan Rizvi, David K. Milne, Phil T. Rumsby, and Malcolm C. Gower "Laser micromachining: new developments and applications", Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); https://doi.org/10.1117/12.387562

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