7 June 2000 Laser technologies for manufacturing of advanced materials and devices
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Proceedings Volume 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V; (2000) https://doi.org/10.1117/12.387595
Event: Symposium on High-Power Lasers and Applications, 2000, San Jose, CA, United States
Abstract
As demand is growing for devices capable of performing new and increased numbers of operations within an ever shrinking physical volume the laser has become an increasingly important tool helping to overcome the limitations of conventional microfabrication techniques. In addition to classical applications of lasers such as via hole drilling, trimming or pulsed laser deposition of thin films, there have been new developments of laser-based technologies for the fabrication of advanced micro- and nano-devices. Of particular interest for optoelectronic and photonic applications is the potential of the laser for the fabrication of integrated and monolithically integrated photonic devices and circuits.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan J. Dubowski, "Laser technologies for manufacturing of advanced materials and devices", Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); doi: 10.1117/12.387595; https://doi.org/10.1117/12.387595
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