24 March 2000 High-temperature proton-exchange as an efficient method for fabrication of low-loss LiNbO3 waveguides
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Proceedings Volume 3936, Integrated Optics Devices IV; (2000) https://doi.org/10.1117/12.379945
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States
Abstract
An efficient method, the high temperature proton exchange (HTPE), to fabricate high-quality LiNbO3 optical waveguides is studied. The new proton exchange source, the stearic acid diluted by lithium stearate, is proposed for HTPE process. The known Soft Proton Exchange (SPE) process can be realized by HTPE. THere are no phase transitions when the (alpha) -phase waveguides are fabricated by SPE. This phase presents the same crystalline structure as that of LiNbO3 and, as expected, maintains the excellent nonlinear and electro-optical properties of the bulk material. The kinetics of HTPE is studied.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuri N. Korkishko, Yuri N. Korkishko, Vyacheslav A. Fedorov, Vyacheslav A. Fedorov, Oksana Y. Feoktistova, Oksana Y. Feoktistova, Evgueni A. Baranov, Evgueni A. Baranov, Eugeny M. Paderin, Eugeny M. Paderin, } "High-temperature proton-exchange as an efficient method for fabrication of low-loss LiNbO3 waveguides", Proc. SPIE 3936, Integrated Optics Devices IV, (24 March 2000); doi: 10.1117/12.379945; https://doi.org/10.1117/12.379945
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