24 March 2000 Si-based integrated optical and photonic microstructures
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Proceedings Volume 3936, Integrated Optics Devices IV; (2000) https://doi.org/10.1117/12.379932
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States
Abstract
The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry- Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride, silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.
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Matti J. Leppihalme, Timo T. Aalto, Pekka Katila, Paeivi Heimala, Martti Blomberg, Simo K. T. Tammela, "Si-based integrated optical and photonic microstructures", Proc. SPIE 3936, Integrated Optics Devices IV, (24 March 2000); doi: 10.1117/12.379932; https://doi.org/10.1117/12.379932
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