Translator Disclaimer
24 March 2000 Si-based integrated optical and photonic microstructures
Author Affiliations +
Proceedings Volume 3936, Integrated Optics Devices IV; (2000) https://doi.org/10.1117/12.379932
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States
Abstract
The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry- Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride, silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matti J. Leppihalme, Timo T. Aalto, Pekka Katila, Paeivi Heimala, Martti Blomberg, and Simo K. T. Tammela "Si-based integrated optical and photonic microstructures", Proc. SPIE 3936, Integrated Optics Devices IV, (24 March 2000); https://doi.org/10.1117/12.379932
PROCEEDINGS
14 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Group IV mid-infrared photonics
Proceedings of SPIE (February 26 2015)
Passive Resonator Gyro
Proceedings of SPIE (September 16 1984)
Microresonators as promising building blocks for VLSI photonics
Proceedings of SPIE (September 30 2005)

Back to Top