Convergent-beam parallel detection x-ray diffraction system for characterizing combinatorial epitaxial thin films

Kazuhiko Omote; T. Kikuchi; J. Harada; Masashi Kawasaki; Akira Ohtomo; M. Ohtani; Tsuyoshi Ohnishi; Daisuke Komiyama; Hideomi Koinuma

doi:10.1117/12.385416

17 May 2000 Convergent-beam parallel detection x-ray diffraction system for characterizing combinatorial epitaxial thin films

Kazuhiko Omote, T. Kikuchi, J. Harada, Masashi Kawasaki, Akira Ohtomo, M. Ohtani, Tsuyoshi Ohnishi, Daisuke Komiyama, Hideomi Koinuma

Author Affiliations +

Proceedings Volume 3941, Combinatorial and Composition Spread Techniques in Materials and Device Development; (2000) https://doi.org/10.1117/12.385416
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

For the rapid structural characterization of combinatorial epitaxial thin films, we developed an X-ray diffraction system. A convergent X-ray beam from a curved crystal monochromator is focused on sample surface about 0.1 mm X 10 mm in size. Diffraction patterns of this area are simultaneously observed on the 2D detector within a few degree. Thus, rocking curve profiles of combinatorial epitaxial thin films for one-column pixels can be measured rapidly with Bragg peak of substrate; the measurement time depends on the film thickness, but the most cases are within one minute.

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Kazuhiko Omote, T. Kikuchi, J. Harada, Masashi Kawasaki, Akira Ohtomo, M. Ohtani, Tsuyoshi Ohnishi, Daisuke Komiyama, and Hideomi Koinuma "Convergent-beam parallel detection x-ray diffraction system for characterizing combinatorial epitaxial thin films", Proc. SPIE 3941, Combinatorial and Composition Spread Techniques in Materials and Device Development, (17 May 2000); https://doi.org/10.1117/12.385416

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