17 May 2000 Convergent-beam parallel detection x-ray diffraction system for characterizing combinatorial epitaxial thin films
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Abstract
For the rapid structural characterization of combinatorial epitaxial thin films, we developed an X-ray diffraction system. A convergent X-ray beam from a curved crystal monochromator is focused on sample surface about 0.1 mm X 10 mm in size. Diffraction patterns of this area are simultaneously observed on the 2D detector within a few degree. Thus, rocking curve profiles of combinatorial epitaxial thin films for one-column pixels can be measured rapidly with Bragg peak of substrate; the measurement time depends on the film thickness, but the most cases are within one minute.
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Kazuhiko Omote, Kazuhiko Omote, T. Kikuchi, T. Kikuchi, J. Harada, J. Harada, Masashi Kawasaki, Masashi Kawasaki, Akira Ohtomo, Akira Ohtomo, M. Ohtani, M. Ohtani, Tsuyoshi Ohnishi, Tsuyoshi Ohnishi, Daisuke Komiyama, Daisuke Komiyama, Hideomi Koinuma, Hideomi Koinuma, "Convergent-beam parallel detection x-ray diffraction system for characterizing combinatorial epitaxial thin films", Proc. SPIE 3941, Combinatorial and Composition Spread Techniques in Materials and Device Development, (17 May 2000); doi: 10.1117/12.385416; https://doi.org/10.1117/12.385416
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