17 May 2000 High-throughput optimizations of alloy and doped films based on ZnO and parallel synthesis of ZnO/MgxZN1-xO quantum wells using combinatorial laser MBE toward ultraviolet laser
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Abstract
We report high-throughput optimizations for various material parameters of Mg,Zn1-xO and Zn1-xCdxO alloy films, Al-doped ZnO films, MgxZn1-xO/ZnO single quantum wells and superlattice structures with using combinatorial laser MBE. Combinatorial chips including nine thin film pixels were grown on lattice-matched ScAlMgO4 (0001) substrates by switching the mask patterns and targets during pulsed laser deposition.
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Akira Ohtomo, Takayuki Makino, Kentaro Tamura, Yuji Matsumoto, Yusaburo Segawa, ZiKang Tang, George K.L. Wong, Hideomi Koinuma, Masashi Kawasaki, "High-throughput optimizations of alloy and doped films based on ZnO and parallel synthesis of ZnO/MgxZN1-xO quantum wells using combinatorial laser MBE toward ultraviolet laser", Proc. SPIE 3941, Combinatorial and Composition Spread Techniques in Materials and Device Development, (17 May 2000); doi: 10.1117/12.385415; https://doi.org/10.1117/12.385415
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