17 May 2000 High-throughput optimizations of alloy and doped films based on ZnO and parallel synthesis of ZnO/MgxZN1-xO quantum wells using combinatorial laser MBE toward ultraviolet laser
Author Affiliations +
Abstract
We report high-throughput optimizations for various material parameters of Mg,Zn1-xO and Zn1-xCdxO alloy films, Al-doped ZnO films, MgxZn1-xO/ZnO single quantum wells and superlattice structures with using combinatorial laser MBE. Combinatorial chips including nine thin film pixels were grown on lattice-matched ScAlMgO4 (0001) substrates by switching the mask patterns and targets during pulsed laser deposition.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Akira Ohtomo, Akira Ohtomo, Takayuki Makino, Takayuki Makino, Kentaro Tamura, Kentaro Tamura, Yuji Matsumoto, Yuji Matsumoto, Yusaburo Segawa, Yusaburo Segawa, ZiKang Tang, ZiKang Tang, George K.L. Wong, George K.L. Wong, Hideomi Koinuma, Hideomi Koinuma, Masashi Kawasaki, Masashi Kawasaki, } "High-throughput optimizations of alloy and doped films based on ZnO and parallel synthesis of ZnO/MgxZN1-xO quantum wells using combinatorial laser MBE toward ultraviolet laser", Proc. SPIE 3941, Combinatorial and Composition Spread Techniques in Materials and Device Development, (17 May 2000); doi: 10.1117/12.385415; https://doi.org/10.1117/12.385415
PROCEEDINGS
12 PAGES


SHARE
Back to Top