Application of laser wavelength standard to interferometry measurements in air with nanometric accuracy

Suat Topcu; Jean-Pierre Wallerand; Yasser Alayli; Patrick Juncar

doi:10.1117/12.380528

29 March 2000 Application of laser wavelength standard to interferometry measurements in air with nanometric accuracy

Suat Topcu, Jean-Pierre Wallerand, Yasser Alayli, Patrick Juncar

Proceedings Volume 3945, Laser Diodes and LEDs in Industrial, Measurement, Imaging, and Sensors Applications II; Testing, Packaging, and Reliability of Semiconductor Lasers V; (2000) https://doi.org/10.1117/12.380528
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

This paper presents a comparison between interferometric heterodyne measurements of a commercial system (Axiom 2/20, Zygo) with its frequency stabilized He-Ne laser source and the same apparatus whose laser source has been replaced by our wavelength stabilized laser diode. The aim of this paper is only to demonstrate the feasibility of length measurements by interferometric techniques using new type of laser source which is insensitive to fluctuations of the refractive index of air.

Citation Download Citation

Suat Topcu, Jean-Pierre Wallerand, Yasser Alayli, and Patrick Juncar "Application of laser wavelength standard to interferometry measurements in air with nanometric accuracy", Proc. SPIE 3945, Laser Diodes and LEDs in Industrial, Measurement, Imaging, and Sensors Applications II; Testing, Packaging, and Reliability of Semiconductor Lasers V, (29 March 2000); https://doi.org/10.1117/12.380528

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KEYWORDS

Semiconductor lasers

Refractive index

Interferometry

Laser sources

Laser interferometry

Zerodur

Diffraction gratings

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