29 March 2000 Multi-degree-of-freedom displacement measurement system using a diffraction grating
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Abstract
Multi-degree-of-freedom (MDOF) displacement measurement systems are needed in many application fields; precision machine control, precision assembly, vibration analysis, and so on. This paper presents a new MDOF displacement measurement system that is composed of a laser diode (LD), two position- sensitive detectors (PSDs), and a conventional diffraction grating. It utilizes typical features of a diffraction grating to obtain the information of MDOF displacement. MDOF displacement is calculated from the independent coordinate values of the diffracted ray spots on the PSDs. Forward and inverse kinematic problems were solved to compute the MDOF displacement of an object. Experimental results show maximum absolute errors of less than plus or minus 10 micrometers in translation and plus or minus 30 arcsecs in rotation.
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Jong-Ahn Kim, Jong-Ahn Kim, Kyung-Chan Kim, Kyung-Chan Kim, Eui Won Bae, Eui Won Bae, Soo Hyun Kim, Soo Hyun Kim, Yoon Keun Kwak, Yoon Keun Kwak, } "Multi-degree-of-freedom displacement measurement system using a diffraction grating", Proc. SPIE 3945, Laser Diodes and LEDs in Industrial, Measurement, Imaging, and Sensors Applications II; Testing, Packaging, and Reliability of Semiconductor Lasers V, (29 March 2000); doi: 10.1117/12.380531; https://doi.org/10.1117/12.380531
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