29 March 2000 Self-mixing interferometry for distance and displacement measurement by Fourier transform method
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Abstract
A compact optical sensor for the measurement of distance and displacement has been developed by using the self-mixing effect of a laser diode. Although the principle of self-mixing interference is different from conventional interference, it is shown that FFT analysis technique can also be used to detect the signal phase and increase the measurement precision of self-mixing interferometry. The optical phase of self- mixing interference is detected by FFT analysis, and the phase error caused by the laser frequency fluctuation was reduced by using a reference reflector. By these techniques, we can determine the distance from centimeters to a few meters and the displacement with nanometer precision.
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Ming Wang, Takahiko Sato, Guanming Lai, Shigenobu Shinohara, "Self-mixing interferometry for distance and displacement measurement by Fourier transform method", Proc. SPIE 3945, Laser Diodes and LEDs in Industrial, Measurement, Imaging, and Sensors Applications II; Testing, Packaging, and Reliability of Semiconductor Lasers V, (29 March 2000); doi: 10.1117/12.380549; https://doi.org/10.1117/12.380549
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