27 April 2000 Fabrication and testing of polyimide thermo-optic switches
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Proceedings Volume 3952, Optoelectronic Interconnects VII; Photonics Packaging and Integration II; (2000); doi: 10.1117/12.384402
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States
Abstract
CMOS compatible optical polyimide based thermo-optic switches have the potential use as low-power switches. These switches would have many advantages over other switches based on inorganic crystals. For one, they can be integrated into module-to-module systems using currently available VLSI fabrication techniques. Polyimide based, 1 by 2 thermo-optic switches are fabricated onto silicon wafers and tested. We report the properties and characteristics of digital thermo- optic switches designed to operate at 1.3 micrometers . Also, the switching characteristics at different heating electrode voltages are tested and compared.
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John Martin Taboada, Dechang An, Zan Shi, Jeffery J. Maki, Suning Tang, Ray T. Chen, "Fabrication and testing of polyimide thermo-optic switches", Proc. SPIE 3952, Optoelectronic Interconnects VII; Photonics Packaging and Integration II, (27 April 2000); doi: 10.1117/12.384402; https://doi.org/10.1117/12.384402
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KEYWORDS
Switches

Electrodes

Thermal optics

Semiconducting wafers

Polymers

Optical fabrication

Objectives

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