26 October 1983 Compact Air Bearing Beam Scanner: Production And Test
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Proceedings Volume 0396, Advances in Laser Scanning and Recording; (1983) https://doi.org/10.1117/12.935224
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland
Abstract
Metrology and production aspects of a precision polygon mirror bea, deflector are discussed. The Intop-Watt air bearing spindle integrates a polygon mirror wheel into a scanner drive unit of utmost compactness, without mechanical overconstraints. This unit is the ideal combination polygon/drive for applications requiring the accuracy provided by air bearing spindles. Accuracy verification for all essential functional surfaces is described based on "all-over" interferometry.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Langenbeck, Peter Langenbeck, } "Compact Air Bearing Beam Scanner: Production And Test", Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); doi: 10.1117/12.935224; https://doi.org/10.1117/12.935224
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