15 May 2000 3.2-million-pixel full-frame true 2Φ CCD image sensor incorporating transparent gate technology
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Abstract
This paper describes the performance of an advanced high- resolution full-frame architecture CCD imaging device for use in scientific, medical and other high-performance monochromatic digital still imaging applications. Of particular interest is the replacement of the polysilicon 2nd gate electrode with that of a more spectrally transparent material thereby dramatically improving device sensitivity. This has been achieved without compromising performance in other areas such as dark current, noise, transfer efficiency and, most importantly, yield.
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Eric J. Meisenzahl, Eric J. Meisenzahl, Winchyi Chang, Winchyi Chang, William Des Jardin, William Des Jardin, Hung Doan, Hung Doan, Joseph E. Shepherd, Joseph E. Shepherd, Eric G. Stevens, Eric G. Stevens, "3.2-million-pixel full-frame true 2Φ CCD image sensor incorporating transparent gate technology", Proc. SPIE 3965, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications, (15 May 2000); doi: 10.1117/12.385464; https://doi.org/10.1117/12.385464
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