15 May 2000 Backside-illuminated 6.6-μm pixel video-rate CCDs for scientific imaging applications
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Abstract
A family of backside illuminated CCD imagers with 6.6 micrometers pixels has been developed. The imagers feature full 12 bit (> 4,000:1) dynamic range with measured noise floor of < 10 e RMS at 5 MHz clock rates, and measured full well capacity of > 50,000 e. The modulation transfer function performance is excellent, with measured MTF at Nyquist of 46% for 500 nm illumination. Three device types have been developed. The first device is a 1 K X 1 K full frame device with a single output port, which can be run as a 1 K X 512 frame transfer device. The second device is a 512 X 512 frame transfer device with a single output port. The third device is a 512 X 512 split frame transfer device with four output ports. All feature the high quantum efficiency afforded by backside illumination.
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John R. Tower, Peter A. Levine, Fu-Lung Hsueh, Vipulkumar Patel, Pradyumna K. Swain, Grazyna M. Meray, James T. Andrews, Robin M. Dawson, Thomas M. Sudol, Robert Andreas, "Backside-illuminated 6.6-μm pixel video-rate CCDs for scientific imaging applications", Proc. SPIE 3965, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications, (15 May 2000); doi: 10.1117/12.385470; https://doi.org/10.1117/12.385470
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