15 May 2000 Backside-illuminated 6.6-μm pixel video-rate CCDs for scientific imaging applications
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Abstract
A family of backside illuminated CCD imagers with 6.6 micrometers pixels has been developed. The imagers feature full 12 bit (> 4,000:1) dynamic range with measured noise floor of < 10 e RMS at 5 MHz clock rates, and measured full well capacity of > 50,000 e. The modulation transfer function performance is excellent, with measured MTF at Nyquist of 46% for 500 nm illumination. Three device types have been developed. The first device is a 1 K X 1 K full frame device with a single output port, which can be run as a 1 K X 512 frame transfer device. The second device is a 512 X 512 frame transfer device with a single output port. The third device is a 512 X 512 split frame transfer device with four output ports. All feature the high quantum efficiency afforded by backside illumination.
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John R. Tower, John R. Tower, Peter A. Levine, Peter A. Levine, Fu-Lung Hsueh, Fu-Lung Hsueh, Vipulkumar Patel, Vipulkumar Patel, Pradyumna K. Swain, Pradyumna K. Swain, Grazyna M. Meray, Grazyna M. Meray, James T. Andrews, James T. Andrews, Robin M. Dawson, Robin M. Dawson, Thomas M. Sudol, Thomas M. Sudol, Robert Andreas, Robert Andreas, } "Backside-illuminated 6.6-μm pixel video-rate CCDs for scientific imaging applications", Proc. SPIE 3965, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications, (15 May 2000); doi: 10.1117/12.385470; https://doi.org/10.1117/12.385470
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