Delta-doped CCDs with integrated UV coatings

Peter W. Deelman; Shouleh Nikzad; Morley M. Blouke

doi:10.1117/12.385471

15 May 2000 Delta-doped CCDs with integrated UV coatings

Peter W. Deelman, Shouleh Nikzad, Morley M. Blouke

Proceedings Volume 3965, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications; (2000) https://doi.org/10.1117/12.385471
Event: Electronic Imaging, 2000, San Jose, CA, United States

Abstract

We have established our ability to deposit filters and coatings directly on delta-doped CCDs by constructing a metal/insulator molecular-beam epitaxy (MBE) chamber connected via an ultra-high-vacuum transfer line to the silicon MBE chamber, in which delta-doping is performed. We have fabricated preliminary MgF₂ AR coatings on delta- doped SITe CCDs.

Citation Download Citation

Peter W. Deelman, Shouleh Nikzad, and Morley M. Blouke "Delta-doped CCDs with integrated UV coatings", Proc. SPIE 3965, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications, (15 May 2000); https://doi.org/10.1117/12.385471

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