15 May 2000 Delta-doped CCDs with integrated UV coatings
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Abstract
We have established our ability to deposit filters and coatings directly on delta-doped CCDs by constructing a metal/insulator molecular-beam epitaxy (MBE) chamber connected via an ultra-high-vacuum transfer line to the silicon MBE chamber, in which delta-doping is performed. We have fabricated preliminary MgF2 AR coatings on delta- doped SITe CCDs.
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Peter W. Deelman, Shouleh Nikzad, Morley M. Blouke, "Delta-doped CCDs with integrated UV coatings", Proc. SPIE 3965, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications, (15 May 2000); doi: 10.1117/12.385471; https://doi.org/10.1117/12.385471
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