Design of an interferometer for the measurement of long radius optics

Sen Han; Joseph A. Lamb; Artur G. Olszak; Erik Novak

doi:10.1117/12.380092

21 March 2000 Design of an interferometer for the measurement of long radius optics

Sen Han, Joseph A. Lamb, Artur G. Olszak, Erik Novak

Proceedings Volume 3966, Machine Vision Applications in Industrial Inspection VIII; (2000) https://doi.org/10.1117/12.380092
Event: Electronic Imaging, 2000, San Jose, CA, United States

Abstract

Veeco Metrology has designed, built and installed at the California Institute of Technology an interferometer for testing long radius optics for LIGO (Laser Interferometer Gravitational-Wave Observatory). Its accuracy is better than (lambda) /100 P-V for focus and astigmatism coefficients and (lambda) /1000 RMS for the residual surface. Its repeatability is better than (lambda) /4000 RMS with retrace error below 6 nm P-V with 4 fringes of tilt. ROC (radius of curvature) measurement error is less than 3%. In this paper we outline the requirements for the interferometer and discuss more challenging aspects of both the optical design and the alignment. Some measurement results are also presented.

Citation Download Citation

Sen Han, Joseph A. Lamb, Artur G. Olszak, and Erik Novak "Design of an interferometer for the measurement of long radius optics", Proc. SPIE 3966, Machine Vision Applications in Industrial Inspection VIII, (21 March 2000); https://doi.org/10.1117/12.380092

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available