Precision Measurement Of Surface Form By Laser Autocollimation

A. E. Ennos; M. S. Virdee

doi:10.1117/12.935384

26 October 1983 Precision Measurement Of Surface Form By Laser Autocollimation

A. E. Ennos, M. S. Virdee

Proceedings Volume 0398, Industrial Applications of Laser Technology; (1983) https://doi.org/10.1117/12.935384
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

The profile of an optical surface can be measured to nanometre accuracy by integrating slope values obtained by laser autocollimation. An instrument based on this principle for measuring X-ray microscope mirror surfaces of conicoid shape has been developed, and its application to monitoring precision lapping is described. A second system for the measurement of optical flats is also under development.

Citation Download Citation

A. E. Ennos and M. S. Virdee "Precision Measurement Of Surface Form By Laser Autocollimation", Proc. SPIE 0398, Industrial Applications of Laser Technology, (26 October 1983); https://doi.org/10.1117/12.935384

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