19 June 2000 Evaluation of gantry control strategies for x-ray steppers
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Results of an experimental study on the performance of a high speed, precision gantry system for application to X-ray stepper systems are presented. In particular a cross coupled control system design was compared to a master-master controller design on a gantry test bed powered by two linear motors. Tests were performed for the case where only inertial loads were present, as well as for the case where static loads were added to simulate gravity loading. The experiments demonstrated that high speed positioning to an accuracy of +/- 3 micron or less could be obtained with both the cross- coupled and the master-master control strategies. Finally, it was observed that the changes in the dynamics of the closed loop gantry system appear to take place during continuous operation, leading to significant variations in the closed loop performance. It was concluded that robust controller design methods or adaptive control methods would be necessary to meet all performance goals for gantry based X-ray steppers.
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Gerald A. Sullivan, Gerald A. Sullivan, Kari Suiter, Kari Suiter, Dryver R. Huston, Dryver R. Huston, } "Evaluation of gantry control strategies for x-ray steppers", Proc. SPIE 3984, Smart Structures and Materials 2000: Mathematics and Control in Smart Structures, (19 June 2000); doi: 10.1117/12.388804; https://doi.org/10.1117/12.388804

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