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22 June 2000 Design of a piezoelectrically driven hydraulic amplification microvalve for high-pressure high-frequency applications
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Abstract
This paper reports the design of a piezoelectrically-driven microfabricated valve for high frequency control of large pressure fluid flows. The enabling concept of the valve is the ability to convert the small displacement of a piezoelectric element into a large valve cap stroke through the use of a hydraulic fluid, while maintaining high force capability. The current valve design, with operating frequency of 24 kHz and valve stroke of 40 micrometer, has been tailored for use in microhydraulic actuation and energy-harvesting devices, which require high-frequency regulation of approximately 1 ml/sec fluid flows across pressure differentials of 1-2 MPa.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David C. Roberts, Nesbitt W. Hagood, Yu-Hsuan Su, Hanqing Li, and Jorge A. Carretero "Design of a piezoelectrically driven hydraulic amplification microvalve for high-pressure high-frequency applications", Proc. SPIE 3985, Smart Structures and Materials 2000: Smart Structures and Integrated Systems, (22 June 2000); https://doi.org/10.1117/12.388857
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