Optical fiber humidity sensor using a nano Fabry-Perot cavity formed by electrostatic self-assembly

Francisco J. Arregui; Yanjing Liu; Ignacio R. Matias; Richard O. Claus

doi:10.1117/12.388127

12 June 2000 Optical fiber humidity sensor using a nano Fabry-Perot cavity formed by electrostatic self-assembly

Francisco J. Arregui, Yanjing Liu, Ignacio R. Matias, Richard O. Claus

Proceedings Volume 3986, Smart Structures and Materials 2000: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials; (2000) https://doi.org/10.1117/12.388127
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

The electrostatic self-assembly (ESA) process was utilized to fabricate a novel optical fiber humidity sensor based on a nano interferometric cavity. A wide operation range, from 11.3% to 100% relative humidity with a maximum variation of 4.77 dB, was experimentally demonstrated. Due to the short length of the interferometric cavity, less than 400 nm, an LED was used as the light source instead of a laser. The fast response time of this humidity sensor, less than 1.5 seconds, makes it possible to monitor human breathing.

Citation Download Citation

Francisco J. Arregui, Yanjing Liu, Ignacio R. Matias, and Richard O. Claus "Optical fiber humidity sensor using a nano Fabry-Perot cavity formed by electrostatic self-assembly", Proc. SPIE 3986, Smart Structures and Materials 2000: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials, (12 June 2000); https://doi.org/10.1117/12.388127

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