12 June 2000 Optical fiber humidity sensor using a nano Fabry-Perot cavity formed by electrostatic self-assembly
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Abstract
The electrostatic self-assembly (ESA) process was utilized to fabricate a novel optical fiber humidity sensor based on a nano interferometric cavity. A wide operation range, from 11.3% to 100% relative humidity with a maximum variation of 4.77 dB, was experimentally demonstrated. Due to the short length of the interferometric cavity, less than 400 nm, an LED was used as the light source instead of a laser. The fast response time of this humidity sensor, less than 1.5 seconds, makes it possible to monitor human breathing.
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Francisco J. Arregui, Yanjing Liu, Ignacio R. Matias, Richard O. Claus, "Optical fiber humidity sensor using a nano Fabry-Perot cavity formed by electrostatic self-assembly", Proc. SPIE 3986, Smart Structures and Materials 2000: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials, (12 June 2000); doi: 10.1117/12.388127; https://doi.org/10.1117/12.388127
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