7 June 2000 Fabrication of electroactive polymer actuator composed of polypyrrole and solid-polymer electrolyte and its application to micropump
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Abstract
Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed varying polymerization conditions and operating conditions. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm2 for 120 minutes. For the application of conductive polymer actuator to micropump, silicon bulk micromachining process has been combined with polymer processes. By use of parylene diaphragm and anisotropic etching of silicon, the micropump structure composed of polypyrrole and solid polymer electrolyte has been fabricated successfully.
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Seung-Ki Lee, Seung-Ki Lee, Young Choi, Young Choi, WooYoung Sim, WooYoung Sim, Sang Sik Yang, Sang Sik Yang, HoJung An, HoJung An, James Jungho Pak, James Jungho Pak, } "Fabrication of electroactive polymer actuator composed of polypyrrole and solid-polymer electrolyte and its application to micropump", Proc. SPIE 3987, Smart Structures and Materials 2000: Electroactive Polymer Actuators and Devices (EAPAD), (7 June 2000); doi: 10.1117/12.387787; https://doi.org/10.1117/12.387787
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