21 June 2000 Conformal MEMS-IDT gyroscopes and their comparison with fiber optic gyro
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Abstract
This paper presents the design, fabrication and evaluation of a conformal Radio Frequency (RF) MEMS Gyroscope, base don surface acoustic wave resonators (SAWR) and surface acoustic wave sensors (SAWS), with very high sensitivity and dynamic range. Most MEMS gyroscopes based on silicon vibratory sensors utilizes the energy transfer between the two vibratory modes suffers serious drawback in producing identical resonating modes and hence to attain a sub-degree per second is quite impractical. This 1 cm X 1 cm gyroscope is working based on the principles of surface acoustic wave (SAW) standing waves on a piezoelectric substrate. The SWAR creates standing wave inside the cavity and the particles at the anti-nodes of standing wave experience large amplitude of vibrations, which serves as the reference vibrating motion for this gyroscopes. Arrays of metallic dots are strategically positioned at the anti- node locations so that the effect of Coriolis force due to rotation will acoustically amplify the magnitude of the waves. The performance of this 74.2 MHz MEMS Gyroscope has been evaluated using geophone setup and rate table setup, which shows very high sensitivity and dynamic range, which is ideal for the conventional applications. Unlike other MEMS gyroscopes, this gyroscope has a planar configuration with no suspended resonating mechanical structures, thereby giving rise to inherent robustness and shock resistance. With its one layer planar configuration, this gyroscope can easily be implemented to the applications requiring conformal mounting on to a surface of interest.
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Vijay K. Varadan, Vijay K. Varadan, K. A. Jose, K. A. Jose, Pascal B Xavier, Pascal B Xavier, D. Suh, D. Suh, Vasundara V. Varadan, Vasundara V. Varadan, "Conformal MEMS-IDT gyroscopes and their comparison with fiber optic gyro", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388911; https://doi.org/10.1117/12.388911
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