Novel diffuser-nozzle micropump actuated by thermal bubble

Md. Anisur Rahman; F. Ahmed; Y. Zhao; Thomas H. Gong

doi:10.1117/12.388900

21 June 2000 Novel diffuser-nozzle micropump actuated by thermal bubble

Md. Anisur Rahman, F. Ahmed, Y. Zhao, Thomas H. Gong

Proceedings Volume 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS; (2000) https://doi.org/10.1117/12.388900
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

A novel micro-machined valveless diffuser-nozzle micropump is presented in the present paper. The micropump is designed by thermally bubble driven actuation method. This pumping mechanism requires no mechanical moving parts for actuation and control of inlet and outlet. As a result, it requires substantially simplified fabrication process in two wafers, which is compatible with IC fabrication processes. The proposed micropump will provide high actuation stroke than existing micropumps.

Citation Download Citation

Md. Anisur Rahman, F. Ahmed, Y. Zhao, and Thomas H. Gong "Novel diffuser-nozzle micropump actuated by thermal bubble", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); https://doi.org/10.1117/12.388900

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