21 June 2000 Novel diffuser-nozzle micropump actuated by thermal bubble
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Abstract
A novel micro-machined valveless diffuser-nozzle micropump is presented in the present paper. The micropump is designed by thermally bubble driven actuation method. This pumping mechanism requires no mechanical moving parts for actuation and control of inlet and outlet. As a result, it requires substantially simplified fabrication process in two wafers, which is compatible with IC fabrication processes. The proposed micropump will provide high actuation stroke than existing micropumps.
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Md. Anisur Rahman, Md. Anisur Rahman, F. Ahmed, F. Ahmed, Y. Zhao, Y. Zhao, Thomas H. Gong, Thomas H. Gong, } "Novel diffuser-nozzle micropump actuated by thermal bubble", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388900; https://doi.org/10.1117/12.388900
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