21 June 2000 Optimally curved electrodes for a rotary microactuator
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Abstract
The rotary electro-static micro actuators integrating optimally curved electrodes are proposed to enhance the actuating force-generation capability. The results show that the actuating force-generation capability. The results show that the actuating force generated by the prosed design is more than 5 times greater than the conventional shape for the application of hard disk drive device. Also, the results indicate that, as the smaller gap size is allowable, the force generation capability will be dramatically enhanced. In this design the uniformity in the capacitive gap size is the additional feature to be in favor of fabrication of a micro-actuator.
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Sunghwan Jung, Jong up Jeon, Y. Eugene Pak, Sukhan Lee, "Optimally curved electrodes for a rotary microactuator", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388920; https://doi.org/10.1117/12.388920
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