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21 June 2000 Static deflection of microcantilevers in a micropump
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Abstract
This work is a first step in a study that will determine whether CMOS-compatible magnetically actuated micromachined cantilevers can be used as the principle actuators for fluid pumping in a microfluidic system. In this paper, we repot on the result of a finite element study on the static tip deflections of micro-cantilevers actuated by Lorentz forces. Two different micro-cantilever designs have been studied and it is found that the presence of a folded support arm in one of the configurations increases the static tip deflection three-fold. As well, the presence of a stiff silicon nitride layer on the micro-cantilever surface significantly affects the tip deflections when the layer is 0-50 percent of its original thickness; this outcome is independent of the micro-cantilever geometries studied.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sandra Esteves, Alexander M. Robinson, and Abhijit Bhattacharyya "Static deflection of microcantilevers in a micropump", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); https://doi.org/10.1117/12.388919
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