12 June 2000 Self-contained active damping system for pneumatic isolation tables
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Abstract
High resolution metrology and production systems are pushing the capability of existing pneumatic isolation systems. The need for better isolation at low frequency is growing as mechanical noise further constrains the lower limits of many electro-optical technologies and techniques. Unfortunately, the problem is magnified due to the 1-4 Hz natural frequency of pneumatic isolators. An active damping system, the Activator, uses an electromagnetic actuator to apply a damping force to an isolation table to reduce the transmission of these low amplitude, low frequency vibrations from the floor to the table. The system is low cost and easy to install. The controller, sensor, and electronics are integrated with the actuator. Given floor excitations on the order of submicrons, a 12 dB attenuation in transmissibility is achieved. This level of performance was attained after overcoming many physical hurdles due to the very low frequencies and small measurement signals. This unique, self-contained active damper result in a system more tolerant of existing floor locations and environments and is a simple upgrade, relieving the end user of facility improvements or relocation costs. This paper describes these challenges and shows how the performance goals were met providing a compact, economical system.
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Leslie P. Fowler, Stephen P. Buchner, Vyacheslav M. Ryaboy, "Self-contained active damping system for pneumatic isolation tables", Proc. SPIE 3991, Smart Structures and Materials 2000: Industrial and Commercial Applications of Smart Structures Technologies, (12 June 2000); doi: 10.1117/12.388168; https://doi.org/10.1117/12.388168
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