3 February 2000 CAR blanks feasibility study results
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Proceedings Volume 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2000) https://doi.org/10.1117/12.377099
Event: 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 1999, Munich, Germany
Abstract
Appearance of e-beam exposure tools with a high acceleration voltage has created a growing need for a chemically amplified resist (CAR) system with high sensitivity, high contrast, superior resolution and superior post-coating delay stability. While mask-makers have been procuring resist-coated photomask blanks, it is generally considered that CARs must be spin-coated just prior to exposure due to its short shelf-life after coating. However, the industry would like to continue procuring pre-CAR-coated blanks from a blanks supplier, who also intends to support mask-makers in this way. This paper describes the results of a feasibility study on mask blanks coated with CARs for advanced e-beam reticle fabrication.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yasunori Yokoya, Hideo Kobayashi, Takao Higuchi, Keishi Asakawa, Akinori Kurikawa, Tadashi Sakurai, Masahiro Hashimoto, Fumiko Ota, "CAR blanks feasibility study results", Proc. SPIE 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (3 February 2000); doi: 10.1117/12.377099; https://doi.org/10.1117/12.377099
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