Performance study on thin resist for advanced reticle fabrication

Hideo Kobayashi; Takao Higuchi; Keishi Asakawa; Yasunori Yokoya

doi:10.1117/12.377112

3 February 2000 Performance study on thin resist for advanced reticle fabrication

Hideo Kobayashi, Takao Higuchi, Keishi Asakawa, Yasunori Yokoya

Proceedings Volume 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2000) https://doi.org/10.1117/12.377112
Event: 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 1999, Munich, Germany

Abstract

In this paper we discuss advantages and disadvantages of super-thin resist coatings for both e-beam and laser applications. First, we verify advantages of super-thin ZEP7000, particularly evaluating the hole-pattern linearity. Second, we discuss disadvantages of super-thin ZEP7000, including pinhole defect risks. Finally, we examine advantages and disadvantages of super-thin laser resist coatings.

Citation Download Citation

Hideo Kobayashi, Takao Higuchi, Keishi Asakawa, and Yasunori Yokoya "Performance study on thin resist for advanced reticle fabrication", Proc. SPIE 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (3 February 2000); https://doi.org/10.1117/12.377112

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