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3 February 2000 Performance study on thin resist for advanced reticle fabrication
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Proceedings Volume 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2000) https://doi.org/10.1117/12.377112
Event: 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 1999, Munich, Germany
Abstract
In this paper we discuss advantages and disadvantages of super-thin resist coatings for both e-beam and laser applications. First, we verify advantages of super-thin ZEP7000, particularly evaluating the hole-pattern linearity. Second, we discuss disadvantages of super-thin ZEP7000, including pinhole defect risks. Finally, we examine advantages and disadvantages of super-thin laser resist coatings.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hideo Kobayashi, Takao Higuchi, Keishi Asakawa, and Yasunori Yokoya "Performance study on thin resist for advanced reticle fabrication", Proc. SPIE 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (3 February 2000); https://doi.org/10.1117/12.377112
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