21 July 2000 Patterning of highly conducting polyaniline films
Author Affiliations +
Proceedings Volume 3997, Emerging Lithographic Technologies IV; (2000); doi: 10.1117/12.390069
Event: Microlithography 2000, 2000, Santa Clara, CA, United States
Polyaniline is a family of soluble, electrically conducting polymers that have a potential for a number of applications. They are a unique class of electronic materials which combines the electronic properties of metals with the mechanical and physical properties, and the processing advantages of a conventional organic polymer. In this paper, we will discuss the synthesis, and formulation of a highly conductive polyaniline that has applications as electrodes or thin film wiring. However, for these and other uses it is necessary to pattern the conducting polymer lithographically. We will discuss the various ways of patterning polyaniline, either indirectly or using the conventional photoresist technology. The effects of each patterning procedure on the conductivity of the polyaniline will also be covered.
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Teresita O. Graham, Ali Afzali-Kushaa, Marie Angelopoulos, Jeffrey D. Gelorme, Jane M. Shaw, "Patterning of highly conducting polyaniline films", Proc. SPIE 3997, Emerging Lithographic Technologies IV, (21 July 2000); doi: 10.1117/12.390069; https://doi.org/10.1117/12.390069



Optical lithography

Reactive ion etching


Photoresist developing


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