23 June 2000 High-yield resin fractionation using a liquid/liquid centrifuge
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Abstract
Resins used in photoresist manufacturing are often relatively expensive once processing steps (fractionation e.g.) and yield losses are factored into the net cost. We have previously reported on the merits of using an economically more attractive fractionation process using a liquid/liquid centrifuge. Further refinements of this method indicate that waste streams could be reduced by recycling the extractant phase and that lower molecular weight fractions removed from the starting resin might be used in making other resist ingredients [speed enhancers, photoactive compound (PAC) backbones e.g.]. Both of these improvements would reduce the overall manufacturing costs of making resist raw materials and the final products made with them.
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Stan F. Wanat, M. Dalil Rahman, Balaji Narasimhan, Douglas S. McKenzie, Michelle M. Cook, "High-yield resin fractionation using a liquid/liquid centrifuge", Proc. SPIE 3999, Advances in Resist Technology and Processing XVII, (23 June 2000); doi: 10.1117/12.388336; https://doi.org/10.1117/12.388336
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